JPS6457645U - - Google Patents
Info
- Publication number
- JPS6457645U JPS6457645U JP15157887U JP15157887U JPS6457645U JP S6457645 U JPS6457645 U JP S6457645U JP 15157887 U JP15157887 U JP 15157887U JP 15157887 U JP15157887 U JP 15157887U JP S6457645 U JPS6457645 U JP S6457645U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- cylindrical body
- receiver
- cylinder
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 1
- 238000002039 particle-beam lithography Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15157887U JPS6457645U (en]) | 1987-10-02 | 1987-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15157887U JPS6457645U (en]) | 1987-10-02 | 1987-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457645U true JPS6457645U (en]) | 1989-04-10 |
Family
ID=31425744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15157887U Pending JPS6457645U (en]) | 1987-10-02 | 1987-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457645U (en]) |
-
1987
- 1987-10-02 JP JP15157887U patent/JPS6457645U/ja active Pending